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SUB-20-NM-WIDE LINE FABRICATION IN POLY(METHYLMETHACRYLATE) USING A GA+ MICROPROBE

被引：30
作者：
KUBENA, RL
STRATTON, FP
WARD, JW
ATKINSON, GM
JOYCE, RJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期
关键词：
D O I：
10.1116/1.584460
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1798 / 1801
页数：4
相关论文
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