MICROMACHINING OF OPTICAL STRUCTURES WITH FOCUSED ION-BEAMS

被引：27

作者：

HARRIOTT, LR

SCOTTI, RE

CUMMINGS, KD

AMBROSE, AF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583865

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：207 / 210

页数：4

相关论文

共 8 条

[1] SHORT-CAVITY GAALAS LASER BY WET CHEMICAL ETCHING
BOUADMA, N
RIOU, J
BOULEY, JC
[J]. ELECTRONICS LETTERS, 1982, 18 (20) : 879 - 880
[2] LOW THRESHOLD GAAS/GAALAS BH LASERS WITH ION-BEAM-ETCHED MIRRORS
BOUADMA, N
RIOU, J
KAMPFER, A
[J]. ELECTRONICS LETTERS, 1985, 21 (13) : 566 - 568
[3] GALNASP-INP STRIPE-GEOMETRY LASER WITH A REACTIVE-ION-ETCHED FACET
COLDREN, LA
IGA, K
MILLER, BI
RENTSCHLER, JA
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (08) : 681 - 683
[4] GAMO K, 1986, P SPIE, V632
[5] INTEGRATED-CIRCUIT REPAIR USING FOCUSED ION-BEAM MILLING
HARRIOTT, LR
WAGNER, A
FRITZ, F
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 181 - 184
[6] MICROMACHINING OF INTEGRATED OPTICAL STRUCTURES
HARRIOTT, LR
SCOTTI, RE
CUMMINGS, KD
AMBROSE, AF
[J]. APPLIED PHYSICS LETTERS, 1986, 48 (25) : 1704 - 1706
[7] AN ALGAAS/GAAS SHORT-CAVITY LASER AND ITS MONOLITHIC INTEGRATION USING MICROCLEAVED FACETS (MCF) PROCESS
WADA, O
YAMAKOSHI, S
SAKURAI, T
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1984, 20 (02) : 126 - 130
[8] APPLICATIONS OF FOCUSED ION-BEAMS
WAGNER, A
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 355 - 362