MICROMACHINING OF INTEGRATED OPTICAL STRUCTURES

被引：44

作者：

HARRIOTT, LR

SCOTTI, RE

CUMMINGS, KD

AMBROSE, AF

机构：

来源：

关键词：

D O I：

10.1063/1.96809

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1704 / 1706

页数：3

共 10 条

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