Field emitters based on Si tips with AlN coating

被引：15

作者：

Spitsyn, BV

Zhirnov, VV

Blaut-Bachev, AN

Bormatova, LV

Belyanin, AF

Pashchenko, PV

Bouilov, LL

Givargizov, EI

机构：

[1] Russian Acad Sci, Inst Phys Chem, Moscow 117915, Russia

[2] Russian Acad Sci, Inst Crystallog, Moscow 117333, Russia

[3] TECHNOMASH Cent Res Technol Inst, Moscow 121355, Russia

来源：

关键词：

aluminum nitride; field emission; silicon tips;

D O I：

10.1016/S0925-9635(97)00280-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Silicon field emitters were coated with AlN by a reactive magnetron sputtering technique. The thickness of the coatings varied from 0.5 to 2 mu m. Emission characteristics of AlN coated emitters were measured. The poor reproducibility of emission characteristics for different samples prepared at the same conditions may be attributed to the non-reproducible concentration of impurities, first of all, oxygen in AlN films. (C) 1998 Elsevier Science S.A.

引用

页码：692 / 694

页数：3

共 9 条

[1]

BELYANIN AF, 1991, PRIBORY TEHNIKA EXP, V3, P220

[2] OBSERVATION OF A NEGATIVE ELECTRON-AFFINITY FOR HETEROEPITAXIAL ALN ON ALPHA(6H)-SIC(0001) [J].

BENJAMIN, MC ;

WANG, C ;

DAVIS, RF ;

NEMANICH, RJ .

APPLIED PHYSICS LETTERS, 1994, 64 (24) :3288-3290

[3] Fabrication of field emission display prototype based an Si field emission arrays with diamond coating [J].

Givargizov, EI ;

Zhirnov, VV ;

Chubun, NN ;

Stepanova, AN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (02) :450-453

[4] Cold emission from the single-crystalline microparticle of diamond on a Si tip [J].

Givargizov, EI ;

Zhirnov, VV ;

Kuznetsov, AV ;

Plekhanov, PS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03) :2030-2033

[5] ULTRASHARP TIPS FOR FIELD-EMISSION APPLICATIONS PREPARED BY THE VAPOR LIQUID SOLID GROWTH TECHNIQUE [J].

GIVARGIZOV, EI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (02) :449-453

[6]

WOJAK GJ, 1996, 9 INT VAC MICR C 7 1, P217

[7]

WOJAK GJ, 1997, THESIS N CAROLINA ST

[8] On the cold emission mechanism of diamond coated tips [J].

Zhirnov, VV .

JOURNAL DE PHYSIQUE IV, 1996, 6 (C5) :107-112

[9] Wide band gap materials for field emission devices [J].

Zhirnov, VV ;

Wojak, GJ ;

Choi, WB ;

Cuomo, JJ ;

Hren, JJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03) :1733-1738

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