Spinodal decomposition during step-flow growth

被引:29
作者
Tersoff, J
机构
[1] IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598
关键词
D O I
10.1103/PhysRevB.56.R4394
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Relatively little is known about the epitaxial growth of alloys that are thermodynamically unstable. An analysis here suggests that spinodal decomposition can take place by formation of step bunches with alternating composition. This provides a possible mechanism for the spontaneous formation of superlattices during molecular beam epitaxy alloy growth. Kinetic effects reduce the degree of decomposition, relative to equilibrium. At sufficiently high growth rates, decomposition is completely suppressed.
引用
收藏
页码:R4394 / R4397
页数:4
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