Microcontact printing of indium metal using salt solution "ink"

被引：1

作者：

Allen, C. G. ^{[1
]}

Dorr, J. C.

Khandekar, A. A.

Beach, J. D.

Schick, I. C.

Schick, E. J.

Collins, R. T.

Kuech, T. F.

机构：

[1] Colorado Sch Mines, Dept Phys, Golden, CO 80401 USA

[2] Univ Wisconsin, Dept Chem Engn, Madison, WI 53706 USA

来源：

THIN SOLID FILMS | 2007年 / 515卷 / 17期

基金：

美国国家科学基金会;

关键词：

microcontact printing; indium metal arrays; anisotropic etching;

D O I：

10.1016/j.tsf.2007.02.070

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Poly(dimethlysiloxane) stamps were made from Si masters fabricated using photolithography and anisotropic etching. GaCl3 and In(NO3)(3) were microcontact printed onto Si substrates, creating arrays of micron size metal salt deposits. The In(NO3)(3) deposits were further processed by annealing in an N-2 :H-2 (9:1) forming gas environment at 600 degrees C which converted the deposits into In metal. The ability to inexpensively pattern metal arrays on semiconductor surfaces has implications for ohmic contacts and, with additional processing, arrays of semiconductor crystallites for optoelectronic applications. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：6812 / 6816

页数：5

共 24 条

[1]

BARYCKA I, 1995, SENSOR ACTUAT A-PHYS, V48, P228

[2] Formation of regular arrays of submicron GaAs dots on silicon [J].