Additive Patterning of conductors and superconductors by solution stamping nanolithography

被引:5
作者
Chang, NA [1 ]
Richardson, JJ [1 ]
Clem, PG [1 ]
Hsu, JWP [1 ]
机构
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
copper; oxides; printing; soft lithography; superconductors;
D O I
10.1002/smll.200500264
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A new approach to adaptive patterning of conductors and superconductors by solution stamping nanolithography (SSNL) was analyzed. SSNL simplifies the feature-defining process and bypasses etching steps that can damage materials. In SSNL, a polydimethylsiloxane (PDMS) elastomeric stamp containing relief patterns is first inked with a precursor solution of inorganic materials and then placed on a substrate of choice to transfer this ink from the stamp to the substrate. The new approach can be used to print patterned, functional oxides on flexible or curved substrates without the need for subsequent etching.
引用
收藏
页码:75 / 79
页数:5
相关论文
共 18 条
[1]   AC loss reduction of YBCO coated conductors by multifilamentary structure [J].
Amemiya, N ;
Kasai, S ;
Yoda, K ;
Jiang, ZN ;
Levin, GA ;
Barnes, PN ;
Oberly, CE .
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2004, 17 (12) :1464-1471
[2]   Monolayer-mediated deposition of tantalum(V) oxide thin film structures from solution precursors [J].
Clem, PG ;
Jeon, NL ;
Nuzzo, RG ;
Payne, DA .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1997, 80 (11) :2821-2827
[3]   Patterning conductive copper by nanotransfer printing [J].
Felmet, K ;
Loo, YL ;
Sun, YM .
APPLIED PHYSICS LETTERS, 2004, 85 (15) :3316-3318
[4]   Nanopatterning of "hard" magnetic nanostructures via dip-pen nanolithography and a sol-based ink [J].
Fu, L ;
Liu, XG ;
Zhang, Y ;
Dravid, VP ;
Mirkin, CA .
NANO LETTERS, 2003, 3 (06) :757-760
[5]   PATTERNING OF DIELECTRIC OXIDE THIN-LAYERS BY MICROCONTACT PRINTING OF SELF-ASSEMBLED MONOLAYERS [J].
JEON, NL ;
CLEM, PG ;
NUZZO, RG ;
PAYNE, DA .
JOURNAL OF MATERIALS RESEARCH, 1995, 10 (12) :2996-2999
[6]   Additive fabrication of integrated ferroelectric thin-film capacitors using self-assembled organic thin-film templates [J].
Jeon, NL ;
Clem, P ;
Jung, DY ;
Lin, WB ;
Girolami, GS ;
Payne, DA ;
Nuzzo, RG .
ADVANCED MATERIALS, 1997, 9 (11) :891-&
[7]   Micromolding in capillaries: Applications in materials science [J].
Kim, E ;
Xia, YN ;
Whitesides, GM .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1996, 118 (24) :5722-5731
[8]   Epitaxial growth of patterned SrBi2Ta2O9 lines by channel stamping [J].
Kim, JH ;
Lange, FF ;
Cheon, CI .
JOURNAL OF MATERIALS RESEARCH, 1999, 14 (04) :1194-1196
[9]  
KITTEL C, 1996, INTRO SOLID STATE PH, P160
[10]   Chemical solution routes to single-crystal thin films [J].
Lange, FF .
SCIENCE, 1996, 273 (5277) :903-909