Comparative study of GaN/AlGaN MQWs grown homoepitaxially on (1(1)over-bar-00) and (0001) GaN

被引:28
作者
Bhattacharyya, A
Friel, I
Iyer, S
Chen, TC
Li, W
Cabalu, J
Fedyunin, Y
Ludwig, KF
Moustakas, TD
Maruska, HP
Hill, DW
Gallagher, JJ
Chou, MC
Chai, B
机构
[1] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA
[2] Boston Univ, Dept Phys, Boston, MA 02215 USA
[3] Crystal Photon Inc, Sanford, FL 32773 USA
关键词
photoluminescence; X-ray diffraction; chloride vapor phase epitaxy; molecular beam epitaxy; nitrides; semiconducting III-V materials;
D O I
10.1016/S0022-0248(02)02433-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Structural and optical properties of GaN/AlGaN multiple quantum wells (MQWs) grown by plasma-assisted molecular-beam epitaxy on (1 (1) over bar 0 0) plane free-standing GaN substrates and (0 0 0 1) GaN quasi-substrates have been compared. Atomic force microscopy studies indicate that the films and MQW structures grown on both substrates replicate the surface morphology of the substrates. MQWs with AlGaN barriers grown in the presence of In flux have stronger photoluminescence (PL) intensity than those with AlGaN barriers without In. X-ray diffraction spectra of MQWs grown on the (0 0 0 1) GaN substrates show larger number of superlattices peaks than those grown on (1 (1) over bar 0 0) substrates suggesting that the former have smoother interfaces. The PL spectra of MQWs deposited on (0 0 0 1) GaN substrates, where the growth is in a polar direction, exhibit a red-shift as well as a decrease in peak intensity with increase in well widths. Similar MQW structures on the (1 (1) over bar 0 0) GaN, on which the growth is in a non-polar direction, do not exhibit this phenomenon, which we attribute to the absence of internal electric fields in these structures. PL intensity of MQWs with a well width of 75 A is 20 times stronger for those grown on the (1 (1) over bar 0 0) plane than on the (0 0 0 1) plane GaN substrate. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:487 / 493
页数:7
相关论文
共 10 条
  • [1] Well-width dependence of the ground level emission of GaN/AlGaN quantum wells
    Bonfiglio, A
    Lomascolo, M
    Traetta, G
    Cingolani, R
    Di Carlo, A
    Della Sala, F
    Lugli, P
    Botchkarev, A
    Morkoc, H
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 87 (05) : 2289 - 2292
  • [2] GaN homoepitaxy on freestanding (1(1)over-bar00) oriented GaN substrates
    Chen, CQ
    Gaevski, ME
    Sun, WH
    Kuokstis, E
    Zhang, JP
    Fareed, RSQ
    Wang, HM
    Yang, JW
    Simin, G
    Khan, MA
    Maruska, HP
    Hill, DW
    Chou, MMC
    Chai, B
    [J]. APPLIED PHYSICS LETTERS, 2002, 81 (17) : 3194 - 3196
  • [3] In as a surfactant for the growth of GaN (0001) by plasma-assisted molecular-beam epitaxy
    Kruse, C
    Einfeldt, S
    Böttcher, T
    Hommel, D
    [J]. APPLIED PHYSICS LETTERS, 2001, 79 (21) : 3425 - 3427
  • [4] Growth of quaternary AlInGaN/GaN heterostructures by plasma-induced molecular beam epitaxy
    Lima, AP
    Miskys, CR
    Karrer, U
    Ambacher, O
    Wenzel, A
    Rauschenbach, B
    Stutzmann, M
    [J]. JOURNAL OF CRYSTAL GROWTH, 2000, 220 (04) : 341 - 344
  • [5] Molecular-beam epitaxy of GaN/AlxGa1-xN multiple quantum wells on R-plane (10(1)over-bar-2) sapphire substrates
    Ng, HM
    [J]. APPLIED PHYSICS LETTERS, 2002, 80 (23) : 4369 - 4371
  • [6] In-plane polarization anisotropy of the spontaneous emission of M-plane GaN/(Al,Ga)N quantum wells
    Rau, B
    Waltereit, P
    Brandt, O
    Ramsteiner, M
    Ploog, KH
    Puls, J
    Henneberger, F
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (21) : 3343 - 3345
  • [7] Nitride semiconductors free of electrostatic fields for efficient white light-emitting diodes
    Waltereit, P
    Brandt, O
    Trampert, A
    Grahn, HT
    Menniger, J
    Ramsteiner, M
    Reiche, M
    Ploog, KH
    [J]. NATURE, 2000, 406 (6798) : 865 - 868
  • [8] Growth of M-plane GaN(1(1)over-bar-00) on γ-LiAlO2(100)
    Waltereit, P
    Brandt, O
    Ramsteiner, M
    Uecker, R
    Reiche, P
    Ploog, KH
    [J]. JOURNAL OF CRYSTAL GROWTH, 2000, 218 (2-4) : 143 - 147
  • [9] M-plane GaN(1(1)over-bar-00) grown on γ-LiAlO2(100):: nitride semiconductors free of internal electrostatic fields
    Waltereit, P
    Brandt, O
    Ramsteiner, M
    Trampert, A
    Grahn, HT
    Menniger, J
    Reiche, M
    Ploog, KH
    [J]. JOURNAL OF CRYSTAL GROWTH, 2001, 227 : 437 - 441
  • [10] Effects of piezoelectricity and spontaneous polarization on electronic and optical properties of wurtzite III-V nitride quantum wells
    Wan, SP
    Xia, JB
    Chang, K
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 90 (12) : 6210 - 6216