Investigation on Molybdenum Thin Films Deposited by DC-Sputtering on Polyethylene Terephthalate Substrate

被引：10

作者：

Faraj, M. G. ^{[1
]}

Ibrahim, K. ^{[1
]}

Eisa, M. H. ^{[1
,2
]}

Ali, M. K. M. ^{[1
]}

Azhari, F. ^{[1
]}

机构：

[1] Univ Sains Malaysia, Sch Phys, George Town 11800, Malaysia

[2] Sudan Univ Sci & Technol, Dept Phys, Coll Sci, Khartoum, Sudan

来源：

INTERNATIONAL JOURNAL OF POLYMERIC MATERIALS | 2010年 / 59卷 / 08期

关键词：

DC sputtering; molybdenum; polyethylene terephthalate; BACK CONTACT; SOLAR-CELLS; EVAPORATION;

D O I：

10.1080/00914031003760733

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

Molybdenum (Mo) films were prepared by DC sputtering on a polyethylene terephthalate (PET) substrate with different thicknesses. The molybdenum finds use in a very broad spectrum of applications in widely different forms. The obtained results of thin films of molybdenum deposited on PET are characterized by atomic force microscopy (AFM) and X-ray diffraction (XRD) and (EDX). It was found that the thickness increases with the time of deposition and reduces the resistivity and sheet resistance. The lowest resistivity value we found for the Mo films was 1.3x10-5 center dot cm at thickness (210nm).

引用

页码：622 / 627

页数：6

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