Initial results for a quadrupole mass spectrometer with a silicon micromachined mass filter

被引：25

作者：

Taylor, S

Tunstall, JJ

Syms, RRA

Tate, T

Ahmad, MM

机构：

[1] Univ Liverpool, Dept Elect Engn & Elect, Liverpool L69 3BX, Merseyside, England

[2] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, Opt & Semicond Device Sect, London SW7 2AZ, England

来源：

ELECTRONICS LETTERS | 1998年 / 34卷 / 06期

关键词：

D O I：

10.1049/el:19980410

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Initial results are presented from tests of a low voltage, low power, miniature quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of the device is discussed, along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of the lens including a mass spectrum for an argon/air mixture and the effect of cage voltage, emission current and pressure on the performance.

引用

页码：546 / 547

页数：2

共 7 条

[1]

Austin W. E., 1976, Quadrupole mass spectrometry, P121

[2] QUADRUPOLE GAS ANALYZERS [J].