Growth and characterization of GaN:Mn epitaxial films

被引:32
作者
Graf, T [1 ]
Gjukic, M
Hermann, M
Brandt, MS
Stutzmann, M
Görgens, L
Philipp, JB
Ambacher, O
机构
[1] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany
[2] Tech Univ Munich, Phys Dept E12, D-85748 Garching, Germany
[3] Bayer Akad Wissensch, Walther Meissner Inst, D-85748 Garching, Germany
[4] Tech Univ Ilmenau, Zentrum Mikro & Nanotechnol, D-98684 Ilmenau, Germany
关键词
D O I
10.1063/1.1577811
中图分类号
O59 [应用物理学];
学科分类号
摘要
The oxidation states of Mn in epitaxial GaN films grown by plasma induced molecular beam epitaxy were investigated by electron spin resonance (ESR), elastic recoil detection, superconducting quantum interference device magnetization, and photothermal deflection spectroscopy measurements. Comparison of the measured Mn2+ spin densities with the total Mn concentrations in GaN of about 10(20) cm(-3) indicates that the majority of Mn is present in the neutral Mn3+ acceptor state. In samples codoped with Si, electrons are transferred to the Mn acceptors, which is observed by a strong increase of the Mn2+ spin densities in ESR. Simultaneously, this charge transfer reduces the characteristic optical absorption features at 1.5 and above 1.8 eV, suggesting their assignment to a Mn3+-related gap state. (C) 2003 American Institute of Physics.
引用
收藏
页码:9697 / 9702
页数:6
相关论文
共 28 条
[1]   Growth and applications of Group III nitrides [J].
Ambacher, O .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (20) :2653-2710
[2]   Identification of iron transition group trace impurities in GaN bulk crystals by electron paramagnetic resonance [J].
Baranov, PG ;
Ilyin, IV ;
Mokhov, EN .
DEFECTS IN SEMICONDUCTORS - ICDS-19, PTS 1-3, 1997, 258-2 :1167-1172
[3]   Identification of manganese trace impurity in GaN crystals by electron paramagnetic resonance [J].
Baranov, PG ;
Ilyin, IV ;
Mokhov, EN ;
Roenkov, AD .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1996, 11 (12) :1843-1846
[4]   Identification of iron transition group trace impurities in GaN bulk crystals by electron paramagnetic resonance [J].
Baranov, PG ;
Ilyin, IV ;
Mokhov, EN .
SOLID STATE COMMUNICATIONS, 1997, 101 (08) :611-615
[5]   TRANSITION-METAL IMPURITIES IN III-V COMPOUNDS [J].
CLERJAUD, B .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1985, 18 (19) :3615-3661
[6]   Hole-mediated ferromagnetism in tetrahedrally coordinated semiconductors [J].
Dietl, T ;
Ohno, H ;
Matsukura, F .
PHYSICAL REVIEW B, 2001, 63 (19)
[7]   Depth profile analysis with monolayer resolution using elastic recoil detection (ERD) [J].
Dollinger, G ;
Frey, CM ;
Bergmaier, A ;
Faestermann, T .
EUROPHYSICS LETTERS, 1998, 42 (01) :25-30
[8]   ELECTRON SPIN RESONANCE EXPERIMENTS ON DONORS IN SILICON .1. ELECTRONIC STRUCTURE OF DONORS BY THE ELECTRON NUCLEAR DOUBLE RESONANCE TECHNIQUE [J].
FEHER, G .
PHYSICAL REVIEW, 1959, 114 (05) :1219-1244
[9]   Transition metal defects in group-III nitrides:: An ab initio calculation of hyperfine interactions and optical transitions -: art. no. 075204 [J].
Gerstmann, U ;
Blumenau, AT ;
Overhof, H .
PHYSICAL REVIEW B, 2001, 63 (07)
[10]   Spin resonance investigations of Mn2+ in wurtzite GaN and AlN films -: art. no. 165215 [J].
Graf, T ;
Gjukic, M ;
Hermann, M ;
Brandt, MS ;
Stutzmann, M ;
Ambacher, O .
PHYSICAL REVIEW B, 2003, 67 (16)