Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations

被引：36

作者：

Hung, MH ^{[1
]}

Chen, KY

Ho, RW

Cheng, FT

机构：

[1] Natl Def Univ, Chung Cheng Inst Technol, Dept Elect Engn, Tao Yuan 335, Taiwan

[2] Natl Cheng Kung Univ, Inst Mfg Engn, Tainan 70101, Taiwan

来源：

ADVANCED ENGINEERING INFORMATICS | 2003年 / 17卷 / 3-4期

关键词：

e-Diagnostics; e-Maintenance; semiconductor equipment; Web services; information integration framework;

D O I：

10.1016/j.aei.2004.07.004

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

In recent years, the concept of e-Diagnostics and e-Maintenance is proposed in the semiconductor industry. By using Internet and information technologies, e-Diagnostics and e-Maintenance intend to provide equipment specialists with the remote capabilities of connectivity, manipulation, configuration, performance monitoring, and data collection and analysis on equipment to achieve the goal of promptly diagnosing, repairing, and maintaining equipment. In this paper, new-generation information software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc. are used to develop an e-Diagnostics/Maintenance framework with security considerations. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics and maintenance information under a secure communication infrastructure. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：165 / 178

页数：14

共 32 条

[1]

[Anonymous], XML ENCRYPTION SYNTA

[2] Remote instrument diagnosis on the Internet [J].

Caldwell, NHM ;

Breton, BC ;

Holburn, DM .

IEEE INTELLIGENT SYSTEMS & THEIR APPLICATIONS, 1998, 13 (03) :70-76

[3]

CHENG FT, 2002, ROBOT CIM-INT MANUF, V18, P371

[4] Remote diagnosis server architecture [J].

Deb, S ;

Ghoshal, S .

IEEE SYSTEMS READINESS TECHNOLOGY CONFERENCE: 2001 IEEE AUTOTESTCON PROCEEDINGS, 2001, :988-998

[5] Remote drive condition monitoring [J].

Errath, RA ;

Dominguez, JJ .

1999 IEEE-IAS/PCA CEMENT INDUSTRY TECHNICAL CONFERENCE - CONFERENCE RECORD, 1999, :31-48

[6] An intelligent online machine fault diagnosis system [J].

Fong, ACM ;

Hui, SC .

COMPUTING & CONTROL ENGINEERING JOURNAL, 2001, 12 (05) :217-223

[7]

Han J., 2012, Data Mining, P393, DOI [DOI 10.1016/B978-0-12-381479-1.00009-5, 10.1016/B978-0-12-381479-1.00001-0]

[8]

HO RW, 2003, THESIS NATL DEFENSE

[9]

HUANG GW, 2003, THESIS NATL CHENG KU

[10]

Hung MH, 2003, IEEE INT CONF ROBOT, P596

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