Chemical mapping and formation of V-defects in InGaN multiple quantum wells

被引:138
作者
Sharma, N [1 ]
Thomas, P [1 ]
Tricker, D [1 ]
Humphreys, CJ [1 ]
机构
[1] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
关键词
D O I
10.1063/1.1289904
中图分类号
O59 [应用物理学];
学科分类号
摘要
InGaN multiple-quantum-well structures grown by metal-organic chemical-vapor deposition on GaN and capped by p-type GaN are found to contain inverted pyramids of indium-free GaN. High-resolution structural and chemical analyses of these "V-defects" by a number of complementary transmission electron microscopy techniques show that the InGaN quantum wells end abruptly at the V-defect interfaces, which lie on {10-11} planes. Each V-defect has at its center a threading edge dislocation, indicating that the defects are initiated at edge dislocation cores in the presence of indium. The lower temperatures of InGaN/GaN quantum-well growth (790 degrees C/950 degrees C) assist the formation of V-pits, which are subsequently filled in during the growth at higher temperature (1045 degrees C) of the p-type capping layer. (C) 2000 American Institute of Physics. [S0003-6951(00)00335-1].
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页码:1274 / 1276
页数:3
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