Pit formation in GaInN quantum wells

被引:242
作者
Chen, Y
Takeuchi, T
Amano, H
Akasaki, I
Yamano, N
Kaneko, Y
Wang, SY
机构
[1] Hewlett Packard Labs, Palo Alto, CA 94304 USA
[2] Meijo Univ, Dept Elect & Elect Engn, Tempaku Ku, Nagoya, Aichi 468, Japan
[3] Hewlett Packard Labs, Kanagawa 213, Japan
关键词
D O I
10.1063/1.120853
中图分类号
O59 [应用物理学];
学科分类号
摘要
The formation of pits in GaInN quantum wells (QWs) has been studied by atomic force microscopy and transmission electron microscopy. It is found that the pits have a hexahedron cone morphology with six sidewalls on [<1(1)over bar 01>] planes and dislocations connected to their vertexes. The dislocations may induce the formation of pits during the growth of GaInN QWs. (C) 1998 American Institute of Physics.
引用
收藏
页码:710 / 712
页数:3
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