共 86 条
[41]
Growth, structure, and mechanical properties of CNxHy films deposited by dc magnetron sputtering in N2/Ar/H2 discharges
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2000, 18 (05)
:2349-2358
[42]
HELLGREN N, UNPUB
[43]
HELLGREN N, 1999, THESIS LINKOPING STU
[44]
Hofsass H, 1997, MATER RES SOC SYMP P, V438, P575