Photosensitivity and application with 157-nm F2 laser radiation in planar lightwave circuits

被引:8
作者
Chen, KP
Herman, PR
Taylor, R
机构
[1] Univ Toronto, Dept Elect & Comp Engn, Toronto, ON M5S 3G4, Canada
[2] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
关键词
birefringence; F-2 excimer laser; photosensitivity; planar lightwave circuit; UV trimming;
D O I
10.1109/JLT.2002.802227
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Photosensitivity studies of germanosilica planar waveguides were carried out with short-wavelength 157-nm light from an F-2 laser. More than a 5 x 10(-3) refractive-index change was induced in a nonuniform index profile concentrated near the cladding-core interface and confirmed by an atomic force microscopy in 157-nm radiated fiber. This profile geometry narrows with the laser exposure to offer practical application in trimming phase errors and controlling birefringence in frequency domain modulators where a 1.7 x 10(-3) effective index change and a 5 x 10(-4) birefringence change were induced, respectively. The 157-nm photosensitivity response is more than 15 times stronger than that by a 248-nm KrF laser and more than twofold stronger than that by a 193-nm ArF laser.
引用
收藏
页码:140 / 148
页数:9
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