Microstructure and mechanical properties of cathodic arc ion-plated (Al,Ti)N coatings

被引:60
作者
Sato, K
Ichimiya, N
Kondo, A
Tanaka, Y
机构
[1] MMC Kobelco Tool Co Ltd, Akashi, Hyogo 6740971, Japan
[2] Mitsubushi Mat Corp, Ibaraki 3002795, Japan
关键词
microstructure; (Al; Ti)N; X-ray diffraction; residual stress; cutting performance;
D O I
10.1016/S0257-8972(02)00610-2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Cathodic arc ion-plated (Al,Ti)N coatings were deposited on WC-Co substrates by several bias voltages. The residual stress of the films, measured by the X-ray diffraction (XRD) 20-sin(2) psi method, was found to vary significantly with the negative bias voltages. The composition and microstructure of the films were investigated by electron probe microanalysis, and transmission electron microscopy, respectively, and these were also changed by the bias voltages. The changes in composition and microstructure were related to the film strains induced by ion bombardment, and were evaluated by the peak shifts and half-value widths of XRD profiles. At higher bias voltages, the films were mainly composed of granular structures with a size of 100 nm. With the decrease of negative substrate bias voltage, the microstructure changed to a columnar structure with a column size of 120 nm. Carbide drills deposited with (Al,Ti)N coating with lower bias voltages showed better cutting performance in the machining of carbon steel compared with those deposited with coating under high bias voltages. The wear resistance of drill margins is critical for the drilling performance in this test, and the dense columnar (Al,Ti)N films with low strains showed greatly improved wear-resistant characteristics of the drills. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:135 / 143
页数:9
相关论文
共 19 条
[1]  
ALMOND EA, 1983, POWDER METALL, V25, P146
[2]   A SIMPLE-MODEL FOR THE FORMATION OF COMPRESSIVE STRESS IN THIN-FILMS BY ION-BOMBARDMENT [J].
DAVIS, CA .
THIN SOLID FILMS, 1993, 226 (01) :30-34
[3]   MICROSTRUCTURE AND PHYSICAL-PROPERTIES OF POLYCRYSTALLINE METASTABLE TI0.5AL0.5N ALLOYS GROWN BY DC MAGNETRON SPUTTER DEPOSITION [J].
HAKANSSON, G ;
SUNDGREN, JE ;
MCINTYRE, D ;
GREENE, JE ;
MUNZ, WD .
THIN SOLID FILMS, 1987, 153 :55-65
[4]   MATERIAL SELECTION FOR HARD COATINGS [J].
HOLLECK, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2661-2669
[5]   Growth, microstructure, and mechanical properties of arc evaporated TiCxN1-x (0 ≤ x ≤ 1) films [J].
Karlsson, L ;
Hultman, L ;
Johansson, MP ;
Sundgren, JE ;
Ljungcrantz, H .
SURFACE & COATINGS TECHNOLOGY, 2000, 126 (01) :1-14
[6]   ON STRUCTURE AND PROPERTIES OF SPUTTERED TI AND AL BASED HARD COMPOUND FILMS [J].
KNOTEK, O ;
BOHMER, M ;
LEYENDECKER, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2695-2700
[7]   THE STRUCTURE AND COMPOSITION OF TI-ZR-N, TI-AL-ZR-N AND TI-AL-V-N COATINGS [J].
KNOTEK, O ;
BOHMER, M ;
LEYENDECKER, T ;
JUNGBLUT, F .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1988, 106 :481-488
[8]   Wear and cutting performance of coated microdrills [J].
Loffler, F .
SURFACE & COATINGS TECHNOLOGY, 1998, 107 (2-3) :191-196
[9]  
MUNZ WD, 1986, J VAC SCI TECHNOL A, V4, P2717, DOI 10.1116/1.573713
[10]  
NISHIYAMA A, 2001, C P 2 INT C COAT MAN, V8, P1