MICROSTRUCTURE AND PHYSICAL-PROPERTIES OF POLYCRYSTALLINE METASTABLE TI0.5AL0.5N ALLOYS GROWN BY DC MAGNETRON SPUTTER DEPOSITION

被引：223

作者：

HAKANSSON, G

SUNDGREN, JE

MCINTYRE, D

GREENE, JE

MUNZ, WD

机构：

[1] UNIV ILLINOIS,DEPT MAT SCI,COORDINATED SCI LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[3] LEYBOLD HERAEUS GMBH,HANAU,FED REP GER

来源：

THIN SOLID FILMS | 1987年 / 153卷

关键词：

The authors gratefully acknowledge the financial support of Leybold-Hereaus; the Materials Science Division of the U.S. Department of Energy under Contract DE-AC02-76ERO1198 (University of Illinois) and the Swedish Board for Technical Development; STU (Linkoping University); during the course of this work. We would also like to thank Dr. Scherer and Mr. Hensel of Leybold-Hereaus for technical assistanced uring the film growth experiments;

D O I：

10.1016/0040-6090(87)90169-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：55 / 65

页数：11

共 19 条

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