CROSS-SECTION PREPARATION FOR TEM OF FILM-SUBSTRATE COMBINATIONS WITH A LARGE DIFFERENCE IN SPUTTERING YIELDS

被引：71

作者：

HELMERSSON, U

SUNDGREN, JE

机构：

来源：

JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE | 1986年 / 4卷 / 04期

关键词：

D O I：

10.1002/jemt.1060040406

中图分类号：

Q [生物科学];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：361 / 369

页数：9

共 10 条

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