EFFECTS OF SUBSTRATE-TEMPERATURE AND SUBSTRATE MATERIAL ON THE STRUCTURE OF REACTIVELY SPUTTERED TIN FILMS

被引：83

作者：

HIBBS, MK

JOHANSSON, BO

SUNDGREN, JE

HELMERSSON, U

机构：

来源：

THIN SOLID FILMS | 1984年 / 122卷 / 02期

关键词：

D O I：

10.1016/0040-6090(84)90003-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：115 / 129

页数：15

共 29 条

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