共 11 条
[3]
HAUSRATH AH, 1962, D1510 NASA, P45
[5]
Ratner B. D., 1996, BIOMATERIALS SCI INT
[7]
Stoeber B., 2000, ASME INT MECH ENG C
[8]
SWAMINATHAN VS, 2006, THESIS N CAROLINE ST
[10]
A numerical and experimental study on gap compensation and wavelength selection in UV-lithography of ultra-high aspect ratio SU-8 microstructures
[J].
SENSORS AND ACTUATORS B-CHEMICAL,
2005, 110 (02)
:279-288