Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film

被引:128
作者
Roch, I
Bidaud, P
Collard, D
Buchaillot, L
机构
[1] Inst Elect Microelect & Nanotechnol, Dept ISEN, F-59652 Villeneuve Dascq, France
[2] Lab Robot Paris, F-92265 Fontenay Aux Roses, France
[3] Univ Tokyo, Inst Ind Sci, CNRS, CIRMM,Meguro Ku, Tokyo 1538505, Japan
关键词
D O I
10.1088/0960-1317/13/2/323
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we present the fabrication process of a shape memory alloy (SMA) thin film in both monolithic and hybrid configurations. This provides an effective actuation part for a gripper made of SU-8 thick photoresist. We also extensively describe and discuss the assembly of the SMA thin film with the SU-8 mechanism. Measurements show that the SU-8 gripper is able to achieve an opening action of 500 mum in amplitude at a frequency of 1 Hz. Finite element model simulations indicate that a force of 50 mN, corresponding to 400 mum of opening amplitude, should be produced by the SMA actuator. Although the assembly of the TiNi SMA thin film with the SU-8 mechanism is demonstrated, the bond reliability needs further development in order to improve the thermal behavior of the interface. In this paper, we show that SU-8 is well suited as a structural material for microelectromechanical systems (MEMS) applications. An attractive feature in the MEMS design is that the SMA generated force is well matched with the elastic properties of SU-8. From the application point of view, a SMA-actuated SU-8 high-aspect-ratio microgripper can serve as a secure means to transport microelectronics device, because it provides good grasping and safe insulation. This is also a preliminary result for the future development of biogrippers.
引用
收藏
页码:330 / 336
页数:7
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