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Influence of La0.5Sr0.5CoO3 heterostructure electrodes on Pb(Zr,Ti)O3 thin film properties

被引：13
作者：
Im, KV
Kuh, BJ
Park, SO
Lee, SI
Choo, WK
机构：
[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Yusong Gu, Taejon 305701, South Korea
[2] Samung Elect Co, Semicond R&D Ctr, Proc Dev Team, Yongin Si, Kyungki Do, South Korea
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 9B期
关键词：
ferroelectric thin film; oxide electrode; magnetron sputtering; PZT; LSCO;
D O I：
10.1143/JJAP.39.5437
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of multiple-layer bottom electrodes including a La0.5Sr0.5CoO3 (LSCO) layer on the ferroelectric and electric fatigue properties of the PbZr0.5Ti0.5O3 (PZT 50/50) thin film capacitor was investigated. Conductive LSCO thin films consisting of fine perovskite grains can be obtained at relatively low temperatures (400 degreesC) by magnetron sputtering of the ceramic LSCO target. It is found that PZT capacitors having heterostructure electrodes such as Pt/PZT/LSCO/SiO2/Si and Pt/PZT/LSCO/Pt/Ti/SiO2/Si exhibit asymmetric hysteresis loops. These asymmetric capacitors also show fairly good fatigue endurance. Dependence of fatigue on the applied voltage will also be described.
引用
收藏
页码：5437 / 5440
页数：4
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