Characterization of ablation plumes and carbon nitride films produced by reactive pulsed laser deposition in the presence of a magnetic field

被引：21

作者：

Kokai, F

Yamamoto, K

Koga, Y

Fujiwara, S

Heimann, RB

机构：

[1] Inst Res & Innovat, Kashiwa, Chiba 277, Japan

[2] Natl Inst Mat & Chem Res, Tsukuba, Ibaraki 305, Japan

[3] Freiberg Univ Mining & Technol, Freiberg, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / 04期

关键词：

D O I：

10.1007/s003390050685

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have examined the influence of a magnetic field of similar to 0.1 T on the pulsed laser deposition of carbon nitride (CNx) films in a nitrogen atmosphere within the range 5 x 10(-4)-4 x 10(-1) Torr. In the presence of a magnetic field, the emission intensities of N-2 (second positive system) and CN species in the graphite ablation plumes were altered significantly, depending on the pressure of the N-2 environment. Corresponding to an intense CN emission, a magnetic field-induced enhancement of N incorporation - for example, up to 37% at an N-2 pressure of 300 mTorr - and the formation of sp(3) tetrahedral CN bonding were both observed in the films. This suggests that the arrival of CN species at the substrate surface with kinetic energies is important for film deposition.

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收藏

页码：403 / 406

页数：4

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