Theory of strain relaxation in heteroepitaxial systems

被引:26
作者
Schindler, AC
Gyure, MF
Simms, GD
Vvedensky, DD
Caflisch, RE
Connell, C
Luo, E
机构
[1] Univ London Imperial Coll Sci Technol & Med, Blackett Lab, London SW7 2BZ, England
[2] HRL Labs LLC, Malibu, CA 90265 USA
[3] Univ Calif Los Angeles, Dept Math, Los Angeles, CA 90095 USA
[4] Univ Calif Los Angeles, Calif NanoSyst Inst, Los Angeles, CA 90095 USA
[5] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
来源
PHYSICAL REVIEW B | 2003年 / 67卷 / 07期
关键词
D O I
10.1103/PhysRevB.67.075316
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We introduce a general approach to calculating the morphological consequences of coherent strain relaxation in heteroepitaxial thin films based on lattice statics using linear elasticity. The substrate and film are described by a simple cubic lattice of atoms with localized interactions. The boundary conditions at concave and convex corners that appear as a result of this construction, those along straight interfacial segments, and the governing equations are obtained from a variational calculation applied to a discretized form of the total elastic energy. The continuum limit of the equations and the boundary conditions along straight boundaries reproduces standard results of elasticity theory, but the boundary conditions at corners have no such analog. Our method enables us to calculate quantities such as the local strain energy density for any surface morphology once the lattice misfit and the elastic constants of the constituent materials are specified. The methodology is illustrated by examining the strain, displacement, and energies of one-dimensional strained vicinal surfaces. We discuss the effects of epilayer thickness on the energy of various step configurations and suggest that coupling between surface and substrate steps should affect the equilibration of the surface toward the bunched state.
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页数:14
相关论文
共 67 条
[1]   SPONTANEOUS FORMATION OF STRESS DOMAINS ON CRYSTAL-SURFACES [J].
ALERHAND, OL ;
VANDERBILT, D ;
MEADE, RD ;
JOANNOPOULOS, JD .
PHYSICAL REVIEW LETTERS, 1988, 61 (17) :1973-1976
[2]  
[Anonymous], 1958, Z. Kristallogr
[3]  
[Anonymous], 1981, THEORY ELASTICITY
[4]  
Born M., 1954, DYNAMICAL THEORIES C
[5]   THE GROWTH OF CRYSTALS AND THE EQUILIBRIUM STRUCTURE OF THEIR SURFACES [J].
BURTON, WK ;
CABRERA, N ;
FRANK, FC .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1951, 243 (866) :299-358
[6]  
CAFLISCH RE, UNPUB
[7]   A simple level set method for solving Stefan problems [J].
Chen, S ;
Merriman, B ;
Osher, S ;
Smereka, P .
JOURNAL OF COMPUTATIONAL PHYSICS, 1997, 135 (01) :8-29
[8]   ORIGIN OF REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION INTENSITY OSCILLATIONS DURING MOLECULAR-BEAM EPITAXY - A COMPUTATIONAL MODELING APPROACH [J].
CLARKE, S ;
VVEDENSKY, DD .
PHYSICAL REVIEW LETTERS, 1987, 58 (21) :2235-2238
[9]   Molecular-dynamics investigation of the surface stress distribution in a Ge/Si quantum dot superlattice [J].
Daruka, I ;
Barabási, AL ;
Zhou, SJ ;
Germann, TC ;
Lomdahl, PS ;
Bishop, AR .
PHYSICAL REVIEW B, 1999, 60 (04) :R2150-R2153
[10]   MOLECULAR-DYNAMICS MODELING OF VAPOR-PHASE AND VERY-LOW-ENERGY ION-BEAM CRYSTAL-GROWTH PROCESSES [J].
DODSON, BW .
CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1990, 16 (02) :115-130