Capacitive ultrasonic transducer with net backplate

被引：8

作者：

Mattila, P

Stor-Pellinen, J

Ignatius, J

Hietanen, J

Luukkala, M

机构：

[1] VTT Automat, Machine Automat, FIN-33101 Tampere, Finland

[2] Univ Helsinki, Dept Phys, FIN-00014 Helsinki, Finland

[3] Aalto Univ, Lab Computat Engn, FIN-02015 Helsinki, Finland

[4] Nokia Res Ctr, FIN-33721 Tampere, Finland

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2000年 / 11卷 / 08期

关键词：

capacitance; ultrasonic transmitting response; ultrasonic transducer; capacitive transducer; net backplate; air-borne ultrasound;

D O I：

10.1088/0957-0233/11/8/304

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A study is presented of the function of an air-coupled capacitive ultrasonic transducer with uniform net backplate. Net backplates are an easy, fast-to-assemble alternative to grooved backplates. The frequency responses of the transducers were measured and the resonance frequencies were estimated. A procedure to study the electrostatics of the transducer with net backplate geometry is described with calculations of surface charge density distribution, capacitance and sensitivity.

引用

收藏

页码：1119 / 1125

页数：7

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