Determination of the sp3/sp2 ratio in tetrahedral amorphous carbon films by effective medium approximation

被引：18

作者：

Chen, ZY ^{[1
]}

Yu, YH ^{[1
]}

Zhao, JP ^{[1
]}

Wang, X ^{[1
]}

Liu, XH ^{[1
]}

Shi, TS ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China

来源：

JOURNAL OF APPLIED PHYSICS | 1998年 / 83卷 / 03期

关键词：

D O I：

10.1063/1.366826

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this article, a method for the determination of the sp(3)/sp(2) ratio for highly tetrahedral amorphous carbon (ta-C) films is presented. This method is an optical characterization according to the Bruggeman effective medium approximation based on simulation of the infrared reflection spectrum. The simulation reflectivity is in good agreement with the experimental spectrum, and the obtained results of sp(3) content are in good agreement with electron energy loss spectroscopy data, suggesting that this is an effective method for obtaining the sp(3)/sp(2) ratio of ta-C films. (C) 1998 American Institute of Physics. [S0021-8979(98)07803-7].

引用

页码：1281 / 1285

页数：5

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