Light bounces in two-beam scanning laser interferometers

被引：10

作者：

Fujimoto, H

Mana, G

Nakayama, K

机构：

[1] Natl Res Lab Metrol, Ibaraki, Osaka 305, Japan

[2] Ist Metrol G Colonnetti, CNR, I-10135 Turin, Italy

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 5A期

关键词：

metrology; laser interferometry; X-ray interferometry; multiple reflections; errors in laser interferometers; high resolution and accuracy;

D O I：

10.1143/JJAP.39.2870

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The article deals with the effects of light bounces in high-accuracy two-beam interferometers. Particular attention is given to systematic errors. Detailed calculations throw light on so far unexplained periodic variations we observed in the traveling-fringe period and explain them as the fingerprint of a three-beam interference pattern.

引用

页码：2870 / 2875

页数：6

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