Diamond-sensing microdevices for environmental control and analytical applications

被引:58
作者
Haenni, W
Baumann, H
Comninellis, C
Gandini, D
Niedermann, P
Perret, A
Skinner, N
机构
[1] Ctr Suisse Elect & Microtech SA, CSEM, CH-20071 Neuchatel, Switzerland
[2] Univ Neuchatel, Inst Phys, CH-2001 Neuchatel, Switzerland
[3] Ecole Polytech Fed Lausanne, Inst Genie Chim, CH-1015 Lausanne, Switzerland
关键词
applications; diamond films;
D O I
10.1016/S0925-9635(97)00253-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
For the fabrication of microdevices with line widths approching 1 mu m, a patterning methodology has been developed by the modification of an existing plasma etching process, which is suitable for any form and type of diamond. These microdevices have been tested as active sensing elements for both environmental control and metrological applications: voltammetric detection of chlorine, detection of atomic oxygen for space and terrestrial applications, the measurement of ultraviolet (UV) light, and finally, conductive atomic force microscopy (AFM), which is successfully performed today with microfabricated diamond tips. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:569 / 574
页数:6
相关论文
共 17 条
  • [1] BINGGELI M, 1993, P 2 INT C APPL DIAM, P51
  • [2] Carey JJ, 1995, US Patent, Patent No. 5399247
  • [3] High-voltage Schottky diode on epitaxial diamond layer
    Ebert, W
    Vescan, A
    Gluche, P
    Borst, T
    Kohn, E
    [J]. DIAMOND AND RELATED MATERIALS, 1997, 6 (2-4) : 329 - 332
  • [4] Electrical properties of diamond for device applications
    Fox, BA
    Hartsell, ML
    Malta, DM
    Wynands, HA
    Tessmer, GJ
    Dreifus, DL
    [J]. DIAMOND FOR ELECTRONIC APPLICATIONS, 1996, 416 : 319 - 330
  • [5] Diamond microelectronic gas sensors
    Gurbuz, Y
    Kang, WP
    Davidson, JL
    Kinser, DL
    Kerns, DV
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1996, 33 (1-3) : 100 - 104
  • [6] HAENNI W, NIST SP, V885, P83
  • [7] Fabrication of integrated diamond cantilevers with tips for SPM applications
    Kulisch, W
    Malave, A
    Lippold, G
    Scholz, W
    Mihalcea, C
    Oesterschulze, E
    [J]. DIAMOND AND RELATED MATERIALS, 1997, 6 (5-7) : 906 - 911
  • [8] Method for achieving high selectivity and resolution in selectively deposited diamond films
    Kwan, MC
    Gleason, KK
    [J]. DIAMOND AND RELATED MATERIALS, 1996, 5 (09) : 1048 - 1050
  • [9] Hydrogen and oxygen evolution on boron-doped diamond electrodes
    Martin, HB
    Argoitia, A
    Landau, U
    Anderson, AB
    Angus, JC
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1996, 143 (06) : L133 - L136
  • [10] McKeag RD, 1996, MATER RES SOC SYMP P, V416, P419