Combined AFM-SEM study of the diamond nucleation layer on Ir(001)

被引:19
作者
Gsell, S.
Schreck, M. [1 ]
Benstetter, G.
Lodermeier, E.
Stritzker, B.
机构
[1] Univ Augsburg, Inst Phys, D-86135 Augsburg, Germany
[2] Fachhsch Deggendorf, D-94469 Deggendorf, Germany
关键词
diamond growth and characterization; heteroepitaxy; bias enhanced nucleation; iridium;
D O I
10.1016/j.diamond.2006.11.091
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
During bias enhanced nucleation (BEN) of diamond on iridium the nucleation centres are gathered in discrete islands - the so called "domains". The topographic signature of these domains has been clarified in the present study by two different concepts. First scanning electron microscopy (SEM) and atomic force microscopy (AFM) were combined to take images with both techniques of a small identical area on a standard BEN sample. In spite of the 2-3 nm deep roughening of the iridium it turned clearly out that the surface shows a 1 mn deep depression within the domains compared with the surface of the surrounding layer. On a second sample which did not show the normal roughening the domains could be identified directly from AFM images. The topographic signature of the domains was the same. Conductive AFM measurements showed that inside and outside the domains the carbon nucleation layer behaves like a high resistivity dielectric sustaining fields up to 107 V/cm. Finally, the temporal development of the domain patterns was studied by consecutive biasing steps on one sample. Depending on the local ion bombardment conditions we observed lateral growth or shrinkage on the same sample. This result suggests that domain formation is a continuous process during the whole BEN procedure starting from a local nucleation event and subsequent lateral expansion. (C) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:665 / 670
页数:6
相关论文
共 22 条
[1]   Surface modifications and first stages of heteroepitaxial diamond growth on iridium [J].
Bauer, T ;
Gsell, S ;
Hörmann, F ;
Schreck, A ;
Stritzker, B .
DIAMOND AND RELATED MATERIALS, 2004, 13 (02) :335-341
[2]   Analysis of the total carbon deposition during the bias enhanced nucleation of diamond on Ir/SrTiO3 (001) using 13C-methane [J].
Bauer, T ;
Schreck, M ;
Hörmann, F ;
Bergmaier, A ;
Dollinger, G ;
Stritzker, B .
DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) :493-498
[3]   Studies of heteroepitaxial growth of diamond [J].
Bednarski, C ;
Dai, Z ;
Li, AP ;
Golding, B .
DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) :241-245
[4]   Structural properties of the diamond nucleation layer on iridium analyzed by laterally resolved X-ray absorption spectroscopy [J].
Bernhard, Pasqual ;
Ziethen, Christian ;
Schoenhense, Gerd ;
Schreck, Matthias ;
Bauer, Thomas ;
Gsell, Stefan ;
Stritzker, Bernd .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 45 (33-36) :L984-L986
[5]   Initial growth of heteroepitaxial diamond on Ir(001)/MgO(001) substrates using antenna-edge-type microwave plasma assisted chemical vapor deposition [J].
Fujisaki, T ;
Tachiki, M ;
Taniyama, N ;
Kudo, M ;
Kawarada, H .
DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) :246-250
[6]   Diamond heteroepitaxy: pattern formation and mechanisms [J].
Golding, B ;
Bednarski-Meinke, C ;
Dai, Z .
DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) :545-551
[7]   Yttria-stabilized zirconia films of different composition as buffer layers for the deposition of epitaxial diamond/Ir layers on Si(001) [J].
Gsell, S. ;
Fischer, M. ;
Bauer, Th. ;
Schreck, M. ;
Stritzker, B. .
DIAMOND AND RELATED MATERIALS, 2006, 15 (4-8) :479-485
[8]   Epitaxial Ir layers on SrTiO3 as substrates for diamond nucleation:: deposition of the films and modification in the CVD environment [J].
Hörmann, F ;
Roll, H ;
Schreck, M ;
Stritzker, B .
DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) :256-261
[9]  
Kono S, 2005, NEW DIAM FRONT C TEC, V15, P363
[10]   Effect of bias treatment in the CVD diamond growth on Ir(001) [J].
Kono, S ;
Takano, I ;
Goto, I ;
Ikejima, Y ;
Shiraishi, M ;
Abukawa, T ;
Yamada, T ;
Sawabe, A .
DIAMOND AND RELATED MATERIALS, 2004, 13 (11-12) :2081-2087