New bulk accelerometer for triaxial detection

被引：22

作者：

Plaza, JA ^{[1
]}

Chen, H ^{[1
]}

Esteve, J ^{[1
]}

Lora-Tamayo, E ^{[1
]}

机构：

[1] CSIC, CNM, E-08193 Barcelona, Spain

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期

关键词：

triaxial accelerometers; piezoresistive; BESOI; non-linearity;

D O I：

10.1016/S0924-4247(97)01735-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations show a null cross-sensitivity for the x- and y-detections and a very low-level one for the z-direction (< 1.6%). The structure is similar to a twin-mass structure with two central beams and four lateral beams. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：105 / 108

页数：4

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