Sn-enhanced epitaxial thickness during low-temperature Ge(001) molecular-beam epitaxy

被引:11
作者
Bratland, KA
Foo, YL
Desjardins, P
Greene, JE
机构
[1] Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
[2] Univ Illinois, Dept Mat Sci, Urbana, IL 61801 USA
关键词
D O I
10.1063/1.1578712
中图分类号
O59 [应用物理学];
学科分类号
摘要
The incorporation of dilute Sn concentrations C-Sn during Ge(001) low-temperature molecular-beam epitaxy significantly increases the critical thickness h(1)(T-s) for the onset of epitaxial breakdown. With C-Sn=6x10(19) cm(-3), h(1) increases by an order of magnitude at T-s=95 degreesC, while gains in h(1)(T-s) by factors ranging from 3.2 at 95 degreesC to 2.0 at 135 degreesC are obtained with C-Sn=1x10(18) cm(-3) (20 parts per million!). Nevertheless, the ratio of the surface width at breakdown to the in-plane correlation length remains constant, independent of T-s and C-Sn, showing that epitaxial breakdown for both Ge(001) and Sn-doped Ge(001) is directly related to surface roughening. We attribute the dramatic Sn-induced increases in h(1)(T-s) to enhancements in both the Ge surface diffusivity and the probability of interlayer mass transport. This, in turn, results in more efficient filling of interisland trenches, and thus delays epitaxial breakdown during low-temperature growth. (C) 2003 American Institute of Physics.
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页码:4247 / 4249
页数:3
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