Reflection scanning near-field optical microscopy (R-SNOM) in constant height mode with a dielectric probe - Image interpretation and resolution for high topographic variations

被引:15
作者
Barchiesi, D [1 ]
Bergossi, O
Pieralli, C
Spajer, M
机构
[1] Univ Franche Comte, Lab Opt PM Duffieux, CNRS, UMR 6603, F-25030 Besancon, France
[2] Univ Technol Troyes, Lab Nanotechnol & Instrumentat Opt, F-10010 Troyes, France
关键词
resolution; microscopy; near-field; image processing;
D O I
10.1016/S0304-3991(97)00068-5
中图分类号
TH742 [显微镜];
学科分类号
摘要
The understanding of the correlation between the near-field images that are recorded by scanning near-field optical microscopy (SNOM) and the local optical properties of the sample surface (topography, index, etc.) is a condition for the development of such microscopes. The aim of this paper is to show that the "constant height imaging" (CHI) mode provides useful near-field characterizations, even in case of high-relief samples. Actually, the CHI near-field signal is free from perturbations brought by usual feedback regulation systems. Furthermore, we show a comparison between experimental and theoretical data to explain near-field image formation. Finally, we develop a specific method based on the Fourier spectral analysis to characterize the experimental SNOM setup working in CHI mode. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:361 / 370
页数:10
相关论文
共 35 条
[1]  
BAIDA F, 1993, NATO ASI SERIES E, V242, P71
[2]   APPLICATION OF MIE SCATTERING OF EVANESCENT WAVES TO SCANNING TUNNELING OPTICAL MICROSCOPY THEORY [J].
BARCHIESI, D ;
VANLABEKE, D .
JOURNAL OF MODERN OPTICS, 1993, 40 (07) :1239-1254
[3]   Computing the optical near-field distributions around complex subwavelength surface structures: A comparative study of different methods [J].
Barchiesi, D ;
Girard, C ;
Martin, OJF ;
VanLabeke, D ;
Courjon, D .
PHYSICAL REVIEW E, 1996, 54 (04) :4285-4292
[4]   A PERTURBATIVE DIFFRACTION THEORY OF A MULTILAYER SYSTEM - APPLICATIONS TO NEAR-FIELD OPTICAL MICROSCOPY SNOM AND STOM [J].
BARCHIESI, D ;
VANLABEKE, D .
ULTRAMICROSCOPY, 1995, 57 (2-3) :196-203
[5]   A 3-D multilayer model of scattering by nanostructures. Application to the optimisation of thin coated nano-sources [J].
Barchiesi, D .
OPTICS COMMUNICATIONS, 1996, 126 (1-3) :7-13
[6]   Near-field calculations of the electromagnetic field in a metallic sample illuminated by a metallised nano-source [J].
Barchiesi, D ;
BelmarLetelier, L ;
VanLabeke, D .
OPTICAL INSPECTION AND MICROMEASUREMENTS, 1996, 2782 :794-804
[7]   Image resolution in reflection scanning near-field optical microscopy using shear-force feedback: Characterization with a spline and Fourier spectrum [J].
Barchiesi, D ;
Bergossi, O ;
Spajer, M ;
Pieralli, C .
APPLIED OPTICS, 1997, 36 (10) :2171-2177
[8]  
BARCHIESI D, 1997, MICROSC MICROANAL MI, V8
[9]   Visualization of latent images by reflection near field optical microscopy [J].
Bergossi, O ;
Spajer, M ;
Schiavone, P .
ULTRAMICROSCOPY, 1995, 61 (1-4) :241-246
[10]  
BERGOSSI O, 1994, P SOC PHOTO-OPT INS, V2341, P238