Visualization of latent images by reflection near field optical microscopy

被引：14

作者：

Bergossi, O

Spajer, M

Schiavone, P

机构：

[1] UNIV FRANCHE COMTE,UFR SCI,CNRS URA 214,LAB OPT PM DUFFIEUX,F-25030 BESANCON,FRANCE

[2] CTR NATL ETUD TELECOMMUN,CNS,TPM,F-38243 MEYLAN,FRANCE

来源：

ULTRAMICROSCOPY | 1995年 / 61卷 / 1-4期

关键词：

D O I：

10.1016/0304-3991(95)00135-2

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Near field reflection imaging on non-developed photoresists is achieved using a dielectric probe, Preliminary results demonstrate a subwavelength resolution uncorrelated with topographic image and a contrast related to the index change integrated on the layer thickness.

引用

页码：241 / 246

页数：6

共 7 条

[1]

BERGOSSI O, 1994, P SOC PHOTO-OPT INS, V2341, P239, DOI 10.1117/12.195546

[2] COMBINED SHEAR FORCE AND NEAR-FIELD SCANNING OPTICAL MICROSCOPY [J].