Synthesis of ZnO nanorod on bare Si substrate using metal organic chemical vapor deposition

被引：84

作者：

Kim, KS ^{[1
]}

Kim, HW ^{[1
]}

机构：

[1] Inha Univ, Sch Mat Sci & Engn, Nam Ku, Inchon 402751, South Korea

来源：

PHYSICA B-CONDENSED MATTER | 2003年 / 328卷 / 3-4期

关键词：

zinc oxide nanorods; metal organic chemical vapor deposition; scanning electron microscopy;

D O I：

10.1016/S0921-4526(02)01954-3

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We have synthesized the ZnO nanorod on bare silicon substrate using the simple metal organic chemical vapor deposition technique. We investigated the effect of substrate temperature on the growth of ZnO films or nanorods on Si(1 0 0) substrate. The substrate temperature affects deposition process, revealing that ZnO nanorods were obtained at the temperature of 500degreesC. The results showed that the as-prepared nanorods are composed of ZnO with an average diameter of 50-120nm. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：368 / 371

页数：4

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