共 11 条
[2]
CH4-based dry etching of high Q InP microdisks
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2002, 20 (01)
:301-305
[3]
Chuang S. L., 2009, PHYS PHOTONIC DEVICE
[8]
DJORDJEV KD, 2002, THESIS U SO CALIF CA
[9]
Huang T. C., 1989, IEEE Photonics Technology Letters, V1, P168, DOI 10.1109/68.36027