Micromachined fountain pen for atomic force microscope-based nanopatterning

被引：60

作者：

Deladi, S ^{[1
]}

Tas, NR ^{[1
]}

Berenschot, JW ^{[1
]}

Krijnen, GJM ^{[1
]}

de Boer, MJ ^{[1
]}

de Boer, JH ^{[1
]}

Peter, M ^{[1
]}

Elwenspoek, MC ^{[1
]}

机构：

[1] Univ Twente, MESA & Res Inst, NL-7500 AE Enschede, Netherlands

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 22期

关键词：

D O I：

10.1063/1.1823040

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented. (C) 2004 American Institute of Physics.

引用

页码：5361 / 5363

页数：3

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