Design of a laser-assisted tomographic atom probe at Muumlnster University

被引：84

作者：

Schlesiger, Ralf ^{[1
]}

Oberdorfer, Christian ^{[1
]}

Wuerz, Roland ^{[2
]}

Greiwe, Gerd ^{[1
]}

Stender, Patrick ^{[1
]}

Artmeier, Michael ^{[1
]}

Pelka, Patrick ^{[1
]}

Spaleck, Frank ^{[1
]}

Schmitz, Guido ^{[1
]}

机构：

[1] Univ Munster, Inst Mat Phys, D-48149 Munster, Germany

[2] Zentrum Sonnenenergie & Wasserstoff Forsch Baden, D-70565 Stuttgart, Germany

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2010年 / 81卷 / 04期

关键词：

atom probe field ion microscopy; laser beam applications; microelectrodes; tomography; TIME-OF-FLIGHT; FIELD-ION MICROSCOPE; PERFORMANCE; ELECTRODES; INSTRUMENT; DETECTOR; METAL;

D O I：

10.1063/1.3378674

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

To benefit from the latest technical improvements in atom probe analysis, a new tomographic atom probe has been built at the University of Muumlnster, Germany. The instrument utilizes a femtosecond laser system with a high repetition rate combined with the ability of using a micrometer-sized extraction electrode and a wide angle configuration. Since field evaporation is triggered by laser pulses instead of high-voltage pulses, the instrument offers the ability to expand the range of analyzed materials to poorly conducting or insulating materials such as oxides, glasses, ceramics, and polymeric materials. The article describes the design of the instrument and presents characterizing measurements on metals, semiconductors, and oxide ceramic.

引用

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