Unconventional patterning with a modulus-tunable mold: From imprinting to microcontact printing

被引：118

作者：

Yoo, PJ

Choi, SJ

Kim, JH

Suh, D

Baek, SJ

Kim, TW

Lee, HH ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Chem Engn, Seoul 151744, South Korea

[2] Minuta Tech, Ctr Biotechnol Incubating, Seoul 151742, Shillim Dong, South Korea

来源：

CHEMISTRY OF MATERIALS | 2004年 / 16卷 / 24期

关键词：

D O I：

10.1021/cm049068u

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Modulus-tunable ultraviolet (UV) curing molds allow not only physical patterning of imprinting but also chemical patterning of microcontact printing. The mechanical properties of the mold can be tailored by the chain length of an acrylate modulator in the cross-linking reaction. This tunability can be utilized to obtain a proper balance that is needed for a given patterning technique between the rigidity requirement (tensile modulus = 320 MPa) of a mold for patterning a fine structure and the flexibility requirement (tensile modulus = 19.8 MPa) for a conformal contact. Successful low-pressure imprinting of sub-100-nm patterns and microcontact printing of submicrometer patterns verify the suitability of the mold for a wide spectrum of patterning techniques.

引用

页码：5000 / 5005

页数：6

共 38 条

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