Large area GaN Schottky photodiode with low leakage current

被引:4
作者
Aslam, S
Vest, RE
Franz, D
Yan, F
Zhao, Y
机构
[1] Raytheon ITSS, Lanham, MD 20706 USA
[2] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
[3] Keithley Instruments Inc, Cleveland, OH 44139 USA
关键词
D O I
10.1049/el:20045563
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Pt/n-type GaN Schottky photodiodes with large active areas which exhibit low leakage currents are fabricated. Reverse bias leakage currents of 2.7 nA for a 1 cm(2) diode and 14 pA for a 0.25 cm(2) diode both at -0.5 V bias are reported. External quantum efficiency measurements between the spectral range 50 to 500 nm gave a peak responsivity of 77.5 mA/W at 320 nm for a 0.25 cm(2) diode, corresponding to a spectral detectivity, D* = 1.5 x 10(14) cmHz(1/2)W(-1).
引用
收藏
页码:1080 / 1082
页数:3
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