Properties of Love waves: applications in sensors

被引:196
作者
Jakoby, B [1 ]
Vellekoop, MJ [1 ]
机构
[1] Delft Univ Technol, Elect Instrumentat Lab, DIMES, NL-2628 CD Delft, Netherlands
关键词
D O I
10.1088/0964-1726/6/6/003
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Love wave sensors are highly sensitive microacoustic devices which are especially suited for sensing in liquids. In this paper we review the basic properties of Love waves and their utilization in sensor devices for (bio)chemical as well as for density and viscosity measurements. These properties are first discussed in general and then illustrated by means of numerical sample results for an SiO2/ST-quartz layered structure, Furthermore the technology needed to produce such a Love wave device is discussed. Finally we present an overview on the current state of the art in Love wave sensor research.
引用
收藏
页码:668 / 679
页数:12
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