Deposition of AlN layers by collimation magnetron sputtering

The aim of the work was to investigate the possibility of deposition of hard, antiwear coatings with high thickness homogeneity on inner surfaces of deep holes. A planar magnetron with a 100 mm diameter cathode and a "honeycomb"-type collimator was used. The influences of the collimator in the magnetron-substrate system and its geometrical parameters on the current-voltage characteristics of the discharge were checked. Using a Langmuir probe, the ionic current which flows through the collimator was measured. The chemical composition, morphology and thickness distribution of deposited materials were investigated. Investigations of the optical density and reflectance of layers deposited with and without the use of a collimator let us check the change of their optical properties. (C) 1998 Elsevier Science S.A.