MicroJoinery: concept, definition, and application to microsystem development

被引：30

作者：

Gonzalez, C ^{[1
]}

Smith, RL ^{[1
]}

Howitt, DG ^{[1
]}

Collins, SD ^{[1
]}

机构：

[1] Univ Calif Davis, Dept Elect & Comp Engn, Microinstruments & Syst Lab, Davis, CA 95616 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期

关键词：

MEMS; optics; microfabrication; anisotropic etching; silicon;

D O I：

10.1016/S0924-4247(98)00074-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new hybrid technology for fabricating, interconnecting, and assembling microdevices is introduced. This new technology is predicated on the creation of dimensionally scaled manufacturing and assembly techniques and has been coined 'MicroJoinery' as a descriptive designation. MicroJoinery, along with its collected 'toolbox' of associated microfabrication techniques, allows for the facile realization of a widely divergent collection of microsystem components including: fluidic microvalves, microfluidic interconnects, microreaction chambers, xyz positioning microstages, fiber-optic switches, etc. Additionally, MicroJoinery provides a new paradigm for design and practical assembly of microsystems. This paper explores the applications of MicroJoinery by presenting several examples of microdevices and microsystems tractable through MicroJoinery. (C) 1998 Published by Elsevier Science S.A. All rights reserved.

引用

页码：315 / 332

页数：18

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