Cross section measurements for electron-impact dissociation of C4F8 into neutral and ionic radicals

被引：77

作者：

Toyoda, H ^{[1
]}

Iio, M ^{[1
]}

Sugai, H ^{[1
]}

机构：

[1] Nagoya Univ, Sch Engn, Dept Elect Engn, Chikusa Ku, Nagoya, Aichi 46401, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 6A期

关键词：

octafluorocyclobutane; dissociation cross section; neutral radical; electron impact; dissociative ionization cross section;

D O I：

10.1143/JJAP.36.3730

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The absolute cross sections for electron-impact dissociation of octafluoro-cyclobutane (C4F8) into the neutral radicals CF, CF2, CF3 and C3F5 are measured from the threshold to 250 eV. This measurement was accomplished by appearance mass spectrometry in a dual electron beam device. The threshold energies for the neutral dissociation into CF, CF2 and CF3 are 14.5, 10.5 and 12.8 eV, respectively, The cross sections for dissociation from C4F8 into CF2 and CF are much larger than those from CF4. Besides the neutral dissociation, the cross sections for the dissociative ionization of C4F8 are extensively measured for formation of CF+, CF2+, CF3+, C2F3+, C2F4+ and C3F5+.

引用

页码：3730 / 3735

页数：6

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