MEGAHERTZ MONOCRYSTALLINE OPTOMECHANICAL RESONATORS WITH MINIMAL DISSIPATION

被引：17

作者：

Cole, Garrett D. ^{[1
,2
]}

Wilson-Rae, Ignacio ^{[3
]}

Vanner, Michael R. ^{[1
,4
]}

Groeblacher, Simon ^{[1
,4
]}

Pohl, Johannes ^{[5
]}

Zorn, Martin ^{[5
]}

Weyers, Markus ^{[5
]}

Peters, Achim ^{[6
]}

Aspelmeyer, Markus ^{[4
]}

机构：

[1] Austrian Acad Sci, Inst Quantum Opt & Quantum Informat, A-1010 Vienna, Austria

[2] Vienna Univ Technol, Ctr Micro & Nano Struct, A-1040 Vienna, Austria

[3] Tech Univ Munich, Dept Phys, D-80290 Munich, Germany

[4] Univ Vienna, Fac Phys, Vienna, Austria

[5] Ferdinand Braun Inst, Berlin, Germany

[6] Humboldt Univ, Inst Phys, Berlin, Germany

来源：

MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年

基金：

奥地利科学基金会; 欧洲研究理事会;

关键词：

RADIATION-PRESSURE; MICROMIRROR; CAVITY; VHF;

D O I：

10.1109/MEMSYS.2010.5442339

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present detailed experimental and theoretical results for novel micro-optomechanical resonators, representing a significant improvement in the performance of such structures. These devices exhibit eigenfrequencies (f(r)) approaching 4 MHz, reflectivities exceeding 99.98% at 1064 nm, and mechanical quality factors (Q) of 0.8x10(5) (measured at 20 K and 2.5x10(-7) millibar pressure); yielding a Q.(fr) product of 3.1x10(11) Hz, while enabling a finesse of approximately 20,000 when used as an end mirror in an impedance-matched Fabry-Perot optical cavity. These results represent a breakthrough in the development of optomechanical devices applicable to the emerging field of quantum optomechanics.

引用

页码：847 / 850

页数：4

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