An advanced micromachined fermentation monitoring device

被引：3

作者：

Kalinowski, T ^{[1
]}

Rittersma, ZM ^{[1
]}

Benecke, W ^{[1
]}

Binder, J ^{[1
]}

机构：

[1] Univ Bremen, IMSAS, D-28334 Bremen, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 68卷 / 1-3期

关键词：

porous silicon; biomass; PECVD; comb electrodes; dielectric measurement;

D O I：

10.1016/S0925-4005(00)00445-7

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper describes the design and fabrication of a novel sensor for the monitoring of fermentation processes, e.g. the time-resolved amount of living cells in fluids, The device consists of two comb-electrodes patterned on a freestanding membrane. The novelty of this device is the capability to clean it ultrasonically on chip, i.e. by electrostatic excitation of the membrane on which the electrodes are placed. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：281 / 285

页数：5

共 21 条

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