Characterization of highly hydrophobic coatings deposited onto preoxidized silicon from water dispersible organosilanes

被引：34

作者：

Almanza-Workman, AM ^{[1
]}

Raghavan, S

Petrovic, S

Gogoi, B

Deymier, P

Monk, DJ

Roop, R

机构：

[1] Univ Arizona, Dept Mat Sci & Engn, Tucson, AZ 85721 USA

[2] Motorola Inc, Sensor Prod Div, Tempe, AZ 85284 USA

来源：

THIN SOLID FILMS | 2003年 / 423卷 / 01期

基金：

美国国家科学基金会;

关键词：

water dispersible organosilanes; hydrophobic coatings; stiction; coating defects; electrochemical impedance spectroscopy;

D O I：

10.1016/S0040-6090(02)00997-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The formation and quality of highly hydrophobic coatings deposited from water dispersible organosilanes onto pre-oxidized single crystal silicon were studied using atomic force microscopy, ellipsometry, dynamic contact angle measurements and electrochemical impedance spectroscopy (EIS). Highly hydrophobic films of a commercially available water dispersible silane and two different cationic alkoxysilanes were prepared by dip coating. It was found using atomic force microscopy that, in general, the structure of these highly hydrophobic films is a continuous film with some particulates attributed to bulk polymerization of the precursor molecule in water. Film defects were quantified using EIS by the value of charge transfer resistance at the hydrofluoric acid/silicon interface. Potential applications of this type of coatings include reduction/elimination of stiction in micro-electromechanical systems, contact printing in materials microfabrication, inhibition of corrosion and oxidation, prevention of water wetting, lubrication and protein adsorption. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：77 / 87

页数：11

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