Comparison of calculated and measured optical emission intensities in a direct current argon-copper glow discharge

被引:39
作者
Bogaerts, A
Donko, Z
Kutasi, K
Bano, G
Pinhao, N
Pinheiro, M
机构
[1] Univ Instelling Antwerp, Dept Chem, B-2610 Wilrijk, Belgium
[2] Res Inst Solid State Phys & Opt, H-1525 Budapest, Hungary
[3] Inst Tecnol & Nucl, Dept Phys, P-2685 Sacavem, Portugal
[4] Inst Super Tecn, Dept Phys, P-1049001 Lisbon, Portugal
关键词
collisional-radiative model; argon; copper; optical emission;
D O I
10.1016/S0584-8547(00)00253-6
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Based on a collisional-radiative model for argon atoms and copper atoms and (Cu+) ions, which was developed as a part of a comprehensive simulation network, optical emission intensities have been calculated for argon and copper lines in a direct current argon glow discharge with copper cathode, Comparison with experimental data has been made, both with respect to the optical emission spectra and to some selected emission lines as a function of axial position. From this study, information can be obtained about the importance of various plasma processes, like electron, fast ion and fast atom impact excitation, and reabsorption of resonant radiation. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1465 / 1479
页数:15
相关论文
共 30 条
[1]   DIRECT ELECTRON EXCITATION CROSS SECTIONS PERTINENT TO ARGON ION LASER [J].
BENNETT, WR ;
MERCER, GN ;
KINDLMAN.PJ ;
WEXLER, B ;
HYMAN, H .
PHYSICAL REVIEW LETTERS, 1966, 17 (19) :987-&
[2]   HYBRID MONTE-CARLO FLUID MODEL OF A DIRECT-CURRENT GLOW-DISCHARGE [J].
BOGAERTS, A ;
GIJBELS, R ;
GOEDHEER, WJ .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2233-2241
[3]   Collisional-radiative model for an argon glow discharge [J].
Bogaerts, A ;
Gijbels, R ;
Vlcek, J .
JOURNAL OF APPLIED PHYSICS, 1998, 84 (01) :121-136
[4]   Collisional-radiative model for the sputtered copper atoms and ions in a direct current argon glow discharge [J].
Bogaerts, A ;
Gijbels, R ;
Carman, RJ .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1998, 53 (12) :1679-1703
[5]   Role of sputtered Cu atoms and ions in a direct current glow discharge: Combined fluid and Monte Carlo model [J].
Bogaerts, A ;
Gijbels, R .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (03) :1279-1286
[6]   Modeling of glow discharge optical emission spectrometry: Calculation of the argon atomic optical emission spectrum [J].
Bogaerts, A ;
Gijbels, R ;
Vlcek, J .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1998, 53 (11) :1517-1526
[7]   Argon and copper optical emission spectra in a Grimm glow discharge source: mathematical simulations and comparison with experiment [J].
Bogaerts, A ;
Gijbels, R .
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1998, 13 (08) :721-726
[8]   Three-dimensional density profiles of sputtered atoms and ions in a direct current glow discharge: Experimental study and comparison with calculations [J].
Bogaerts, A ;
Wagner, E ;
Smith, BW ;
Winefordner, JD ;
Pollmann, D ;
Harrison, WW ;
Gijbels, R .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1997, 52 (02) :205-218
[9]   Comprehensive modelling network for dc glow discharges in argon [J].
Bogaerts, A .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (02) :210-229
[10]   Investigations on the effect of constriction in the cathode region of argon glow discharges [J].
Donkó, Z ;
Bánó, G ;
Szalai, L ;
Kutasi, K ;
Rózsa, K ;
Pinheiro, M ;
Pinhao, N .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (18) :2416-2425