Small-size microlens characterization by multiwavelength high-resolution interference microscopy

被引：53

作者：

Kim, Myun-Sik ^{[1
]}

Scharf, Toralf ^{[1
]}

Herzig, Hans Peter ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Opt & Photon Technol Lab, CH-2000 Neuchatel, Switzerland

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 14期

关键词：

WAVES;

D O I：

10.1364/OE.18.014319

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Microlenses are widely studied in two main areas: fabrication and characterization. Nowadays, characterization draws more attention because it is difficult to apply test techniques to microlenses that are used for conventional optical systems. Especially, small microlenses on a substrate are difficult to characterize because their back focus often stays in the substrate. Here we propose immersion high-resolution interference microscopy to characterize small-size microlenses at three visible wavelengths. Test results for 20-mu m-diameter microlenses are presented and discussed. We cover not only standard characterizations like wavefront investigations but also experiments of actual focus properties and chromatic behaviors. (C) 2010 Optical Society of America

引用

页码：14319 / 14329

页数：11

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