Reduction of the floating body effect in SOI MOSFETs by using Schottky source/drain contacts

A new silicon-on-insulator metal-oxide-semiconductor field-effect transistor (SOI MOSEET) structure, which employs the Schottky contacts at the source/drain, is proposed to suppress the Boating-body effect. Using a Schottky contact, excess holes in the channel region are smoothly absorbed into the source and the impact ionization near the drain is reduced due to the built-in field. Analysis with two-dimensional simulation verifies these effects. As a result, the early drain breakdown of the SOI MOSFET is suppressed. A test device fabricated using Er silicide self-aligned technology proves the technical feasibility of the proposed device.